川村 みどり Kawamura Midori

学位

担当授業科目（学部）

先端材料物質工学概論　地球環境（2020年度以前入学）, 工学系技術者概論, 材料物性I　先端材料, 先端材料物質総合工学I　先端材料, 先端材料物質工学　先端材料, 先端材料物質総合工学II　先端材料, 先端材料物質工学実験II　先端材料, 薄膜材料工学　先端材料, 先端材料物質工学演習　先端材料, 文献ゼミナール　先端材料, 物理化学I　先端材料, 地球環境工学入門/短期履修, コース概論　地球環境

担当授業科目（大学院）

無機材料特論I　応用化学

専門分野

薄膜電子材料, 無機材料化学, 表面科学

研究テーマ

ナノレイヤを活用した高安定銀薄膜, 最適希ガスを用いた高品質スパッタ金属薄膜, Low-E コーティングのための極薄銀薄膜の作製, 界面を修飾した新規な薄膜作製法の開発, スパッタリング法で作製した金属窒化物薄膜の評価及び生成過程, 有機EL素子の電子・ホール注入層の開発, 半導体ナノ構造の作製

研究内容キーワード

薄膜, スパッタリング法, 電気特性, 固体表面分析, ナノ構造, 銀薄膜の安定化, クリプトン　ガス

所属学会

日本化学会, 応用物理学会, 電気化学会, 表面技術協会, American Vacuum Society

学術論文

論文名／掲載誌名等			掲載年月
Preparation of Rh Thin Films by Reactive Sputtering and Their Characterizations Jpn. J. Appl. Phys., 40, 4, 2339‐2402			2001-04
C‐Axis‐Oriented Ru Thin Films Prepared by Sputtering in Ar and O2 Gas Mixture Jpn. J. Appl. Phys., 40, 12, 6956-6958			2001-12
Optical and Electrical Properties of Pure Ag and Ag‐Based Alloy Thin Films Prepared by Rf Magnetron Sputtering Vacuum, 66, 3-4, 501‐504			2002-05
Effects of Oxygen Gettering and Target Mode Change in Formation Process of Reactively RF Sputtered WOx Thin Films Vacuum, 66, 3-4, 269‐273			2002-05
Highly Textured (100)RuO2/(001)Ru Multi‐Layers Prepared by Reactive Sputtering Jpn. J. Appl. Phys., 41, 11B, 6857-6861			2002-11
Formation Process and Electrical Property of IrO2 Thin Films Prepared by Reactive Sputtering Jpn. J. Appl. Phys., 41, 1, 213-216			2003-01
Nanowires and Nanorings at the Atomic Level Phys Rev Lett, 91, 9, 096102-096105			2003-08
Optical and Electrochromic Properties of RF Reactively Sputtered WO3 Films Solid State Ionics, 165, 1-4, 175-180			2003-12
Formation of Si/Ge Nanostructures at Surfaces by Self-organization J. Phys. Cond. Mat., 16, 17, S1535-S1551			2004-05
Crystal Orientation Change of Ni Films by Sputtering in Ar-N2 Mixed Gases Jpn. J. Appl. Phys., 43, 7A, 4361-4362			2004-07
Fabrication of Si/Ge nanorings structure by MBE Thin Solid Films, 464/465, 185-189			2004-09
Characterization of Ag Oxide Thin Films Prepared Reactive RF Sputtering Vacuum, 76, 1, 1-6			2004-10
Orientation of Metal Films Deposited by Sputtering Using Ar/N2 Gas Mixtures Thin Solid Films, 469-470, 491-494			2004-12
Oxidation and Morphology Change of Ru Films Caused by Sputter Deposition of Ta2O5 Films Jpn. J. Appl. Phys, 44, 4A, 1941-1942			2005-04
Target surface oxide layer formed by reactive sputtering of Ti target in Ar+O2 mixed gas J. Vac. Sci. Technol. A , 23, 5, 1371-1374			2005-09
Electrical and morphological change of Ag-Ni films by annealing in vacuum Microelectronic Eng, 82, 3-4, 277-282			2005-12
Effects of the Ar-N2 Sputtering Gas Mixture on the Preferential Orientation of Sputtered Ru Films Thin Solid Films, 494, 1-2, 204-243			2006-01
Sputter-deposition of Ag films in a nitrogen discharge Thin Solid Films, 515, 2, 540			2006-04
Preparation of Hydrogen-Containing Ta2O5 Thin Films by Reactive Sputtering Using O2 + H2O Mixed Gas Jpn. J. Appl. Phys, 46, 2, 7			2007-02
Target-Surface Compound Layers Formed by Reactive Sputtering of Si Target in Ar + O2 and Ar + N2 Mixed Gases Jpn. J. Appl. Phys., 46, 10A, 6778-6781			2007-10
Comparison of the agglomeration behavior of Ag(Al) films and Ag(Au) films Microelectronic Engineering, 84, 11, 2476-2480			2007-11
Effects of Substrate Cooling during Sputter Deposition of Hydrogen-Containing Ta2O5 Thin Films in H2O Atmosphere on their Ion Conductivity Japanese Journal of Applied Physics, 47, 9, 7269〜7271			2008-09
Ion conducting properties of hydrogen-containing Ta2O5 thin films prepared by reactive sputtering Vacuum, 83, 528〜530			2008-10
Formation process of Al2O3 thin films by reactive sputtering Vacuum, 83, 483〜485			2008-10
Agglomeration behavior of Ag films suppressed by alloying with some elements Vacuum, 63, 610〜613			2008-10
Thermally Stable Ag Thin Films Modified with Very Thin Al Oxide Layers Japanese Journal of Applied Physics, 47, 12, 8917〜8920			2008-12
Ni Oxyhydroxide Thin Films Prepared by Reactive Sputtering Using O2 + H2O Mixed Gas Japanese Journal of Applied Physics, 48, 01550-1〜015501-4			2009-01
Thermally stable very thin Ag films for electrodes J. Vac. Sci. Technol. A, 27, 4, 975-978			2009-07
Improved thermal stability of Ag thin films by organic submonolayer at interface with silicon oxide layer Jpn. J. Appl. Phys., 48, 118002-1〜2			2009-11
Effect of total gas flow rate and sputtering power on the critical condition for target mode transition in Al-O2 reactive sputtering Vacuum, 84, 629-632			2010-01
Agglomeration suppression behavior and mechanisms of Ag-Cu and Ag-Nb thin films Vacuum, 84, 657-662			2010-01
Effects of Sputtering Gas Pressure on Electrochtomic Properties of Ni Oxyhydroxide Thin Films Prepared by Reactive Sputtering in H2O Atmosphere Japanese Journal of Applied Physics, 49, 115802			2010-04
Time-dependent variation of the target mode in reactive sputtering of Al-O2 system Vacuum, 84, 1365-1367			2010-04
Effect of heat treatment on ion conductivity of hydrated ZrO2 thin films prepared by reactive sputtering using H2O gas Jpn. J. Appl. Phys., 50, 045804-1〜5			2011-04
Influence of Interface Layers on Ag Thin Film Growth J. Nanosci. Nanotechnol., 12, 2, 1188-1191			2012-02
Effects of Substrate Temperature on the Ion Conductivity of Hydrated ZrO2 Thin Films Prepared by Reactive Sputtering in H2O Atmosphere Sol. Energy Mater. Sol. Cells, 99, 160-165			2012-04
Electrochromic properties of NiOOH thin films prepared by reactive sputtering in an H2O atmosphere in various aqueous electrolytes Sol. Energy Mater. Sol. Cells, 99, 38-42			2012-04
Effects of substrate temperature on electrochromic properties of cobalt oxide and oxyhydroxide thin films prepared by reactive sputtering using O2 and H2O gases Jpn. J. Appl. Phys, 51, 045501			2012-04
Evaluation of ion conductivity of ZrO2 thin films prepared by reactive sputtering in O2, H2O, and H2O+H2O2 mixed gas Thin Solid Films, 520, 5137-5140			2012-05
Influence of NiO anode buffer layer prepared by solution on performance of bulk-heterojunction solar cells Appl. Surf. Sci, 258, 7809-7812			2012-05
Effects of Nb Surface Layer and Ti Interface Layer on Thermal Stability and Electrical Resistivity of Ag Thin Films Jpn. J. Appl. Phys., 51, 8, 085802			2012-08
Effects of substrate temperature on structure and mechanical properties of sputter deposited fluorocarbon thin films Vacuum, 87, 218-221			2012-10
Thermal stability and electrical properties of Ag-Ti films and Ti/Ag/Ti films prepared by sputtering Vacuum, 87, 222-226			2012-10
Growth of Ag thin film on glass substrate with 3-mercaptopropyltrimethoxysilane (MPTMS) interlayer Journal of Physics: Conference Series, 417, 012004			2013-03
Ag thin film on an organic silane monolayer applied as anode of organic light emitting diode Thin Solid Films, 532, 7			2013-04
Improvement of redox reactions by miniaturizing nanoparticles of zinc Prussian blue analog Appl. Phys. Lett, 102, 141901			2013-04
Dye-sensitized solar cells with sol-gel solution processed Ga-doped ZnO passivation layer Int. J. Electrochem. Sci., 8, 5183			2013-04
Optimization of Surface Layers for Suppression of Agglomeration in Ag Films Jpn. J. Appl. Phys., 52, 7, 078003			2013-07
Thermal stability of Ag Films with Various Interface Layers Jpn. J. Appl. Phys., 53, 4, 048003			2014-04
Structural properties of zinc oxide nanorods grown on Al-doped zinc oxide seed layer and their applications in dye-sensitized solar cells Materials, 7, 2522-2533			2014-04
Growth of zinc oxide nanorods using various seed layer annealing temperatures and substrate materials Int. J. Electrochem. Sci., 9, 2080-2089			2014-04
Formation of hydrated yttrium oxide and titanium oxide thin films by reactive sputtering in H2O atmosphere and their electrical properties Jpn. J. Appl. Phys., 53, 5, 068002			2014-05
Effects of Cu doping on nickel oxide thin film prepared by sol-gel solution process Optik, 125, 2899-2901			2014-06
Structural and optical properties of Cu-, Ag, and Al-doped zinc oxide nanorods Superlattice. Microst., 75, 455			2014-11
Effects of Li and Cu dopants on structural properties of zinc oxide nanorods Superlattice. Microst., 77, 101			2015-01
Accelerated coloration of electrochromic device with the counter electrode of nanoparticulate Prussian blue-type complexes Electrochimica Acta, 163, 288-295			2015-05
A comparative study on the structural properties of ZnO and Ni-doped ZnO nanostructures Materials Letters, 149, 8-11			2015-06
Electrochromic properties of iridium oxide thin films prepared by reactive sputtering in O2 or H2O atmosphere J. Vac. Sci. Technol. B , 33, 041204-1-5			2015-07
Effects of Ag doping amount on structural properties of zinc oxide nanostructures Materials Letters, 153, 85-88			2015-08
Growth behavior of Al-doped zinc oxide microrods with times Superlattice. Microst., 85, 743-746			2015-09
Preparation of an indium zinc oxide-silver-indium zinc oxide multilayer film and its application in organic light-emitting diodes Vacuum, 121, 320-322			2015-11
Suppression of property changes in Ag thin films by introducing organic monolayers Vacuum, 121, 317-319			2015-11
Sequential structural control of open-framework nanoparticles both in dispersion and in film for electrochemical performance tuning Bull. Chem. Soc. Jpn., 88, 11, 1561-1566			2015-11
Determination of effective growth time for zinc oxide nanorods using chemical solution deposition Superlattices and Microstructures, 88, 150-153			2015-12
Effects of Ni dopant on structural properties of zinc oxide nanorods Microelectronic Engineering, 165, 20-22			2016-11
Emission enhancement in indium zinc oxide(IZO)/Ag/IZO sandwiched structure due to surface plasmon resonance of thin Ag film Applied Surface Science, 389, 906-910			2016-12
Morphological characterization of sphere-like structured ZnO-NiO nanocomposites with annealing temperatures Materials Letters, 186, 364-367			2017-01
Preparation of porous zinc oxide-nickel oxide nanocomposites by facile one-pot solution process Ceramics International, 43, 1318-1322			2017-01
Electrochromic properties of sputtered iridium oxide thin films with various film thickness Journal of Materials Science Research, 6, 44-50			2017-01
Spectroscopic and photoluminescent properties of lndium zinc oxide (IZO) and IZO/Ag/IZO sandwiched film J. Electron. Mater. , 47, 3873-3879			2017-07
Reactive sputter deposition of nickel oxide thin films at liquid nitrogen temperature Jpn. J. Appl. Phys., 56, 088004-1-3			2017-08
High-rate sputter deposition of electrochromic nickel oxide thin films using substrate cooling and water vapor injection J. Vac. Sci. Technol. A, 36, 2, 02C102-1-4			2018-03
Metal nanolayer deposited highly stable Ag thin films and their optical properties journal of physics; conference series, 987, 012002-1-5			2018-04
Indium-saving effect and physical properties of transparent conductive multilayers journal of physics; conference series, 987, 012014-1-5			2018-04
Morphological evolution of self-supporting nickel hydroxide nanostructures prepared by a facile wet-chemical method Thin Solid Films, 654, 49-53			2018-04
Structural and electrochemical properties of nanolayer-stacking structured copper-doped nickel hydroxide Int. J. Electrochem. Sci. , 13, 7655-7662			2018-08
Time-resolved photoluminescence study of tris(8-hydroxyquinolinato) aluminum with surface plasmon resonance of Ag nanoparticles Thin Solid Films, 660, 938-943			2018-08
Photoluminescence enhancement of tris(8-hydroxyquinolinato) aluminum thin film by plasmonic Ag nanotriangle array fabricated by nanosphere lithography Thin Solid Films, 660, 907-912			2018-08
Optical properties of highly stable silver thin films using different surface metal layers Thin Solid Films, 660, 730－732			2018-08
Morphological and electrochemical properties of bilayered copper oxide nanostructures directly grown on transparent conductive oxides by a simple wet-chemical process Journal of Electronic Materials, 47, 7296-7300			2018-12
Metallic-mode reactive sputtering of nickel oxide thin films and characterization of their electrochromic properties Japanese Journal of Applied Physics, 58, 055504			2019-05
Comparative study on morphological and electrochemical properties of nickel-cobalt double hydroxide, cobalt hydroxide, and nickel hydroxide Journal of Electronic Materials, 48, 3000			2019-05
Remarkable durability improvement under high humidity of Ag thin film where Al or Ti nanolayer was deposited onto the surface Japanese Journal of Applied Physics, 58, 065502			2019-06
Emission enhancement of tris(8-quinolinolato)aluminum with Al nanotriangle arrays fabricated by nanosphere lithography Applied Surface Science, 478, 49			2019-06
Fabrication and electrochemical characteristics of nanowire-net structured cobalt hydroxide Materials Letters, 246, 195			2019-07
Electrochromic properties of rhodium oxide thin films prepared by reactive sputtering under an O2 or H2O vapor atmosphere Solar Energy Materials and Solar Cells , 200, 109976			2019-09
Hexamethylenetetramin-assisted morphological evolution of nanowire-net and nanosheet-structured cobalt hydroxide Materials Letters, 254, 154			2019-11
Improved durability of Ag thin films under high humidity environment by deposition of surface Al nanolayer Applied Surface Science , 506, 144929			2019-12
High-rate sputter deposition of chromium oxide thin films using water vapor as a reactive gas Applied Surface Science, 387, 125509			2020-02
Morphological evolution of bilayer-structured copper oxide from ribbon-like-structured copper acetate hydroxide with varying growth temperatures materials letters, 265, 127424			2020-02
Fabrication and Characterization of Microcavity Organic Light-Emitting Diode with CaF2/ZnS Distributed Bragg Reflector Thin Solid Films, 699, 137912			2020-03
Size Dependence of Emission Enhancement of Tris(8-hydroxyquinolinato) aluminum with Plasmonic Al Nanostructure Thin Solid Films, 137912			2020-03
Characteristics of Ag thin films deposited in Ar and Kr gases under different gas pressure Surf. Coat. Technol., 388, 125616			2020-03
Large-grained Ag thin films with lower electrical resistivity produced by sputtering in Kr gas Jpn. J. Appl. Phys.			2020-03
Improved electrochromic performance in nickel oxide thin film by Zn doping International Journal of Electrochemical Science, 15, 4065-4071			2020-05
Characterization of Ag/ZnS/Ag multilayered film as transparent electrode for organic light-emitting diode Thin Solid Films, 704, 137999-1-5			2020-06
Characteristics and environmental durability of Ag films with and without Al surface layer sputtered in Ar or Kr gas Thin Solid Films, 704, 138020-1-5			2020-06
Influence of aluminum interlayer on optical properties of very thin silver thin film Surface and Coating Technology, 393, 125752-1-5			2020-07
Electrochromic properties of sputter-deposited rhodium oxide thin films of varying thickness Thin Solid Films, 709, 138226-1-7			2020-09
Influence of substrate cooling on ion conductivity of tantalum oxide thin films prepared by reactive sputtering using water vapor injection Thin Solid Films, 710, 138276-1-5			2020-09
Electrochemical performance of nanosheet-like- and nanoparticle-structured cobalt oxyhydroxide grown on stainless steel mesh substrate Materials Letters, 277, 128293-1-4			2020-10
Effect of TiO2 lowermost layer on crystal orientation and electrical resistivity of glass/TiO2/ZnO/Ag structure in Low-E glass Jpn. J. Appl. Phys., 60, 025501			2021-02
Control of localized surface plasmon resonance of Ag nanoparticles by changing its size and morphology Vacuum, 92, 110432			2021-10
Optimization of lowermost layer material for low-resistivity Ag-based multilayer structure in low-emissivity glass Thin Solid Films, 739, 138996			2021-12
Optical characterization and emission enhancement property of Ag nanomesh structure fabricated by nanosphere lithography Surface & Coatings Technology , 128258			2022-02
Surface morphology of silver thin films exposed to water vapour and/or oxygen in vacuum Transactions of the IMF, 100, 4, 208-212			2022-07
CaF2 /ZnS Multilayered Films on Top-Emission Organic Light-Emitting Diode for Improving Color Purity and Moderation of Dark-Spot Formation ACSOmega, 7, 17861–17867			2022-07
Effects of sputtering with Kr gas and insertion of lowermost layer on electrical resistivity of Ag-multilayer Jpn. J. Appl. Phys., 61, 095503			2022-08
Surface processes on thin layers of black aluminum in ultra-high vacuum Vacuum, 205, 111377			2022-08
Two-color electrochromic devices using a tungsten oxide and nickel oxide double layer Jpn. J. Appl. Phys., 62, 015502			2022-11

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